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Advances in Optical Technologies
Table of Contents
Special Issues
Advances in Optical Technologies
/
2011
/
Article
/
Tab 1
/
Review Article
Collective Micro-Optics Technologies for VCSEL Photonic Integration
Table 1
Summary of main approaches proposed in the literature for integrating microlens on VCSEL devices. The three last columns concern polymer-based technologies.
Integration method
Hybrid assembly
Monolithic integration
UV photolithography
Replication
NIR self-writing
Lateral alignment precision
~
2-3
μ
m (flip-chip
~
1
μ
m)
~
1-2
μ
m
(Top-oxidation
=
self-aligned)
~
1
μ
m
~
1
μ
m
Self-aligned
Vertical positioning
Controlled by spacer and adhesive thicknesses
Controlled by semiconductor process fabrication
Controlled by spin coating conditions
Controlled by molding conditions
Controlled by exposure conditions
Wafer-scale process
No
Yes
Yes
Yes
Yes
Applicable after packaging
Yes
No
No
No
Yes
References
[
2
,
16
–
21
]
[
14
,
26
–
31
]
[
3
,
4
,
34
–
36
,
44
,
46
]
[
38
,
42
]
[
48
]