Research Article
Design and Fabrication of Diffractive Light-Collecting Microoptical Device with 1D and 2D Lamellar Grating Structures
Figure 5
Fabrication process of DOEs; (a) silicon substrate cleaning, (b) PR coating, (c) E-beam lithography, (d) developing, (e) FAB etching, and (f) hot-embossing molding.