Optical Emission Spectroscopic Analysis of Plasma Plume during Pulsed Laser Deposition of PZT
Figure 7
The TOF of Ti I (neutral) ((a) and (b)) and Ti II (ion) ((c) and (d)) at distances 5 mm and 8 mm from the target at pressures 0.1, 0.01, and 0.001 mbar at laser fluence of 3.13 Jcm−2. “” denote the fast peak and “” denotes the slow one.
