Recent Developments in the X-Ray Reflectivity Analysis for Rough Surfaces and Interfaces of Multilayered Thin Film Materials

Figure 10

New calculated reflectivities from a GaAs layer with a thickness of 48 nm on a Si substrate. The line is for a flat surface and a flat interface. The dashed curve is for a surface roughness 𝜎₁ of 4 nm and with a flat interface, while the dotted curve is for a surface roughness 𝜎₁ of 4 nm and interface roughness 𝜎₂ of 4 nm.