Investigation of CPD and HMDS Sample Preparation Techniques for Cervical Cells in Developing Computer-Aided Screening System Based on FE-SEM/EDX

Table 2

Comparison of carbon and oxygen elements based on CPD and HMDS sample preparation techniques in terms of concentration and weight percentage for each specimen.

Name of specimens	Elemental composition (weight %)				Concentration (cps)
	CPD		HMDS		CPD		HMDS
	C	O	C	O	C	O	C	O
Specimen1	45.18	21.19	53.76	23.36	9.31	4.27	103.61	23.95
Specimen2	56.19	17.52	71.63	23.53	13.35	3.31	283.5	29.82
Specimen3	35.35	19.09	63.9	19.4	6.45	4.6	156.31	19.3
Specimen4	43.1	18.46	46.08	41.31	9.93	3.65	96.89	73.66
Specimen5	46.4	14.93	67.83	26.62	10.42	2.97	242.59	30.32
Specimen6	45.81	13.47	67.81	15.35	10.44	2.69	153.2	13.79