Design and Simulation of Capacitive MEMS Switch for Ka Band Application

<div>Variation of switching time (<span class="nowrap"><svg height="11.1049pt" id="M59" style="vertical-align:-3.29108pt" version="1.1" viewbox="-0.0498162 -7.81382 8.46224 11.1049" width="8.46224pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M324 430H196L233 583L223 592L145 529L120 430H54L29 396L31 388H111L56 126C33 15 54 -12 77 -12C137 -12 214 57 250 95L233 119C208 92 155 59 138 59C126 59 120 70 131 125L186 390L298 394L324 430Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,4.368,3.132)"><path d="M357 391C357 416 325 451 270 451C241 451 179 431 146 400C109 365 97 334 97 307C97 248 143 213 196 180C250 146 261 123 261 101C261 75 237 40 190 40C153 40 110 72 86 109C81 116 68 119 55 112C37 102 24 87 24 66C24 30 85 -12 137 -12C229 -12 331 62 331 140C331 189 304 218 236 260C197 284 164 309 164 346C164 381 194 400 220 400C259 400 282 380 304 350C310 342 321 339 330 344C347 353 357 372 357 391Z"></path></g></svg>)</span> with (<span class="nowrap"><svg height="11.439pt" id="M60" style="vertical-align:-2.15067pt" version="1.1" viewbox="-0.0498162 -9.28833 13.4354 11.439" width="13.4354pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M324 430H196L233 583L223 592L145 529L120 430H54L29 396L31 388H111L56 126C33 15 54 -12 77 -12C137 -12 214 57 250 95L233 119C208 92 155 59 138 59C126 59 120 70 131 125L186 390L298 394L324 430Z"></path></g><g transform="matrix(.013,0,0,-0.013,4.433,0)"><path d="M368 703H309L44 -163H104L368 703Z"></path></g><g transform="matrix(.013,0,0,-0.013,9.794,0)"><path d="M238 681C243 705 239 712 230 712C217 712 156 682 75 674L70 648H105C148 648 153 641 144 598L39 110C18 11 35 -12 55 -12C90 -12 166 36 221 103L205 125C174 93 130 65 118 65C112 65 108 68 114 96L238 681Z"></path></g></svg>)</span> ratio of RF-MEMS Shunt Switch.</div>

Wireless Communications and Mobile Computing

fig6

Figure 6

Figure 6: Design and Simulation of Capacitive MEMS Switch for Ka Band Application 