Research Article
Design and Simulation of Capacitive MEMS Switch for Ka Band Application
Table 1
Different actuation techniques for MEMS switch.
| | Technology | Contact force (μN) | Current (mA) | Size | Voltage (V) | Switching time (μs) | Power (mW) |
| | Magnetostatic | 50-200 | 20-150 | Medium | 3-5 | 400-1000 | 0-100 | | Thermal | 500-3500 | 5-100 | Large | 3-5 | 200-10,000 | 0-200 | | Piezoelectric | 50-250 | 0 | Medium | 3-20 | 50-500 | 0 | | Electrostatic | 50-1500 | 0 | Small | 20-80 | 1-200 | 0 |
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