Research Article
Design and Simulation of Capacitive MEMS Switch for Ka Band Application
Table 2
Specific parameters of the proposed MEMS switch.
| Parameters | Value |
| Beam length () | 400 μm | Beam width () | 120 μm | Center conductor width () | 120 μm | Overlap area () | | Dielectric material and constant | AIN &11 | Beam thickness () | 1 μm | Beam material | Gold | Dielectric thickness () | 0.1 μm | Air-gap () | 2.5 μm | Substrate thickness () | | CPW dimension | G/W/G-90 μm/120 μm/90 μm | CPW thickness | 1 μm |
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